| Model | Excel 1051 UM/UC | Excel 1052 UM/UC | Excel 1054 UM/UC |
| Measurement Capacity (mm) | 1050x1050x160 mm | 1050x1050x250 mm | 1050x1050x400 mm |
| Capacity | 100kg | ||
| XY Accuracy (μm) | 4.2+L/200 | 4.5+L/200 | 5.2+L/150 |
| Z Accuracy (μm) | 2.8+L/100 | 3.3+L/100 | 3.8+L/100 |
| Resolution | 0.1μm | ||
| Basic Magnification | 1X(LWD)/2X(SWD) | ||
| Optical Zooming | 12x | ||
| Digital Zooming | 3x | ||
| On-Screen Zooming Range | 15x-540x/30x-1080x | ||
